Substrate processing system, substrate processing apparatus and method for accumulating data for substrate processing apparatus

ABSTRACT

A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored data rate detection unit detecting, as a monitored data rate, a total number of times each type of monitored data changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit allocating a storing frequency to each type of monitored data based on the monitored data rate and an upper limit; a monitored data writing unit writing the monitored data to the temporary memory unit during the second time period based on the storing frequency; an accumulative memory unit storing the monitored data for a plurality of periods; and an accumulative data writing unit reading the monitored data for every third time period and storing the monitored data in the accumulative memory unit.

CROSS-REFERENCE TO RELATED PATENT APPLICATION

This application is a continuation of International Application No.PCT/JP2012/081471 filed on Dec. 5, 2012 which claims priority under 35U.S.C. §119 to Japanese Application No. 2011-278569 filed on Dec. 20,2011, the entire contents of which are hereby incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a substrate processing system or amonitored data collection system collecting and accumulating monitoreddata, for example, a processing temperature or a pressure in aprocessing chamber, etc., which is outputted from a substrate processingapparatus processing a substrate, for example, a semiconductor wafer,etc.

2. Description of the Related Art

FIG. 1 is a perspective view illustrating a manufacturing apparatus of asemiconductor device (semiconductor manufacturing apparatus), which is asubstrate processing apparatus. The substrate processing apparatus shownin FIG. 1 may include component units of the substrate processingapparatus such as a load port 114 loading and unloading pods 110 whichis a substrate accommodating unit accommodating a plurality of wafers(substrates), a pod opener 121 detaching caps of the pods 110, arotating shelf 105 temporarily preserving the pods 110, a pod transferunit 118 transferring the pods 110, a boat 217 stacking and mounting thewafers, a wafer transfer instrument 125 performing transfer of thewafers between the pods 110 loaded on a placing board 122 of the podopener 121 and the boat 217, a thermal processing furnace 202 includinga substrate processing chamber (not shown) or a heater (not shown), aboat elevator 115 loading the boat 217 into and unloading the boat 217from the thermal processing furnace 202, a storing unit (not shown),etc., and a control unit (not shown) controlling each of the componentunits. The control unit may perform wafer processing such as heattreatment, etc. based on a process recipe stored in the memory unit.

A conventional substrate processing apparatus may constantly orperiodically collect monitor information including sensor informationsuch as a temperature measurement value or a pressure value, etc. in thethermal processing furnace 202, and actuator information such as astatus of a switching operation, etc. of an on-off value installed in aprocessing gas supply pipe supplying a processing gas to the thermalprocessing furnace 202 while performing the process recipe, etc. in amonitor information collecting unit installed in the substrateprocessing apparatus, transmit the collected information to a monitoreddata analysis system disposed outside the substrate processingapparatus, accumulate the transmitted information by recording thecollected information in a database consisting of a non-volatile memorymedium such as a hard disk drive (HDD), etc. included in the system, anduse the accumulated information for error analysis when an error occursor data analysis of substrate processing data, etc.

Meanwhile, in order to improve performance of the substrate processingapparatus, an increase in the number of monitored data collectingsensors or an increase of a sampling period for collecting sensor datais performed, for example, the sampling period is increased to 1 Hz to10 Hz, or 100 Hz. In this case, an amount of monitored data is increasedaccording to the increase of the number of monitored data collectingsensors or the increase of the sampling period for collecting the sensordata. However, in the conventional art, when the amount of monitoreddata is increased, much work such as a change of control software of thesystem, etc. is required since the system cannot flexibly respond to theincrease of the amount of monitored data the system receives.

SUMMARY OF THE INVENTION

In the above substrate processing process, a substrate processing systemor a monitored data collecting and accumulating system which does notrequire control software of the system to be changed can respond to anincrease of an amount of the monitored data, and can prevent leakage ofdata accumulation or a system down is provided, even when the amount ofmonitored data is increased according to an increase of the number ofsensors for collecting the monitored data or an increase of a samplingperiod for collecting sensor data.

According to an aspect of the present invention, there is provided asubstrate processing system including: a substrate processing apparatusconfigured to process a substrate; a monitored data receiving unitconfigured to receive a plurality of types of monitored data outputtedfrom the substrate processing apparatus; a temporary memory unitconfigured to periodically store the plurality of types of monitoreddata received by the monitored data receiving unit; a monitored datarate detection unit configured to detect, as a monitored data rate, atotal number of times each type of monitored data received by themonitored data receiving unit changes during a first time period by morethan a predetermined amount; a monitored data writing allocation unitconfigured to allocate, to each type of monitored data, a storingfrequency corresponding to number of times each type of monitored dataof one period is written to the temporary memory unit during a secondtime period based on the monitored data rate detected by the monitoreddata rate detection unit and an upper limit of the storing frequencycorresponding to a total storing frequency of the monitored data storedin the temporary memory unit during the one period; a monitored datawriting unit configured to write the plurality of types of monitoreddata received by the monitored data receiving unit to the temporarymemory unit during the second time period based on the storing frequencyallocated by the monitored data writing allocation unit; an accumulativememory unit configured to store the plurality of types of monitored datastored in the temporary memory unit for a plurality of periods; and anaccumulative data writing unit configured to read the plurality of typesof monitored data stored in the temporary memory unit for every thirdtime period and to store the monitored data in the accumulative memoryunit.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a substrate processing apparatusaccording to an embodiment of the present invention;

FIG. 2 is a vertical cross-sectional view of a substrate processingapparatus according to an embodiment of the present invention;

FIG. 3 is a functional block diagram exemplarily illustrating asubstrate processing apparatus according to an embodiment of the presentinvention;

FIG. 4 is a functional block diagram illustrating a data collecting andaccumulating unit according to an embodiment of the present invention;

FIG. 5 is a ticket distribution table according to a first embodiment ofthe present invention;

FIG. 6 is a ticket distribution table according to a second embodimentof the present invention; and

FIG. 7 is a ticket distribution table according to a third embodiment ofthe present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, a substrate processing apparatus according to an embodimentof the present invention will be described with reference to theaccompanying drawings. In the embodiment, for example, the substrateprocessing apparatus may be configured as a semiconductor manufacturingapparatus performing a process in a manufacturing method of asemiconductor device (an integrated circuit (IC)). In addition,hereinafter, an example in which a batch-type vertical semiconductormanufacturing apparatus (simply referred to hereinafter as a processingapparatus) performing an oxidation process, a diffusion process, or achemical vapor deposition (CVD) process, etc. in a substrate is used asthe substrate processing apparatus will be described. FIG. 1 is aperspective view of a processing apparatus to which the presentinvention is applied. Further, FIG. 2 is a perspective view of avertical cross-section of the processing apparatus shown in FIG. 1.

As shown in FIG. 2, a processing apparatus 100 according to anembodiment of the present invention may use a pod 110 as a wafer carrierstoring wafers 200 (substrates) formed of silicon, etc., and include acase 111. A pod transfer port 112 may be installed in a front wall 111 aof the case 111 to enter the pod inside and outside the case 111, andmay be opened and closed by a front shutter 113. A load port 114 may beinstalled in a frontal side of the pod transfer port 112, and the loadport 114 may place the pod 110. The pod 110 may be loaded into the loadport 114 by a transfer unit (not shown) during a process, and may beunloaded from the load port 114.

A rotating shelf 105 may be installed above substantially a centerportion in a longitudinal direction in the case 111, the rotating shelf105 may rotate around a support 116, and a plurality of pods 110 may bekept on a shelf board 117. As shown in FIG. 2, a pod transfer unit 118may be installed between the rotating shelf 105 and the load port 114 inthe case 111. The pod transfer unit 118 may include a pod elevator 118 acapable of going up and down while holding the pods 110, and a podtransfer instrument 118 b as a horizontal transfer instrument, andtransfer the pods 110 between the load port 114, the rotating shelf 105,and the pod opener 121.

As shown in FIG. 2, a sub case 119 may be installed at a rear end sidearea below the center portion in a longitudinal direction in the case111. A pair of wafer transfer ports 120 for entering the wafers 200inside and outside the sub case 119 may be installed in a frontal wall119 a of the sub case 119, and be vertically disposed in two stairs. Apair of pod openers 121 may be installed in upper and lower wafertransfer ports 120, respectively. The pod opener 121 may include placingboards 122 placing the pods 110, and cap detaching instruments 123detaching caps of the pods 110. The pod opener 121 may open and closethe wafer transfer ports 120 by detaching the cap of the pods 110 placedon the placing boards 122 by the cap detaching instruments 123. Theplacing board 122 may be a placing shelf on which the substrateaccommodating unit is placed when placing the substrate.

As shown in FIG. 2, the sub case 119 may constitute a transfer chamber124 isolated from an atmosphere of an installation space of the podtransfer unit 118 or the rotating shelf 105. A wafer transfer instrument125 may be installed in a front side area of the transfer chamber 124.The wafer transfer instrument 125 may include a wafer transfer unit 125a capable of rotating or moving in a horizontal direction by placing thewafer 200 in tweezers 125 c, and a wafer transfer unit elevator 125 bfor moving up and down the wafer transfer unit 125 a. The wafer 200 maybe loaded into and unloaded from a boat 217 by a continuous operation ofthe wafer transfer unit elevator 125 b and the wafer transfer unit 125a.

As shown in FIG. 1, a clean unit 134 constituted by a supply fan and adust proof filter for supplying a clean atmosphere or clean air 133which is an inert gas may be installed in the transfer chamber 124. Asshown in FIG. 2, the processing furnace 202 may be installed above theboat 217. A substrate processing chamber (not shown) may be included inthe processing furnace 202, and a heater (not shown) for heating theinside of the substrate processing chamber may be installed around thesubstrate processing chamber. A lower end part of the processing furnace202 may be opened and closed by a furnace gate valve 147.

As shown in FIG. 1, a boat elevator 115 may be installed to move theboat 217 up and down. A seal cap 219 may be horizontally installed in anarm 128 connected to the boat elevator 115, vertically support the boat217, and be configured to seal the lower end part of the processingfurnace 202. The boat 217 may include a plurality of supporting members,and be configured to horizontally support the plurality of wafers 200(for example, about 50 to 125 wafers), which are vertically aligned incenter.

Next, an operation of the processing apparatus according an embodimentof the present invention will be described. As shown in FIGS. 1 and 2,when the pod 110 is supplied to the load port 114, the pod transfer port112 may be opened by a front shutter 113, and the pod 110 may enter thepod transfer port 112. The pod 110 that has entered may be automaticallytransferred and delivered to a specified shelf board 117 of the rotatingshelf 105 by the pod transfer unit 118.

After the pod 110 is temporarily kept on the rotating shelf 105, the pod110 may be transferred to one pod opener 121 from the shelf board 117and be transferred to the placing board 122, or may be directlytransferred from the load port 114 to the pod opener 121 and betransferred to the placing board 122. At this time, the wafer transferport 120 of the pod opener 121 may be sealed by the cap detachinginstrument 123, and the clean air 133 may be circulated and fill thetransfer chamber 124.

As shown in FIG. 2, the cap of the pod 110 placed on the placing board122 may be removed by the cap detaching instrument 123, and the wafertransfer port 120 of the pod 110 may be opened. Further, the wafer 200may be picked up by the wafer transfer unit 125 a, and be loaded bybeing transferred to the boat 217. The wafer transfer unit 125 adelivering the wafer 200 to the boat 217 may go back to the pod 110 andload a next wafer 200 into the boat 217.

An opening operation of the pod 110 by the pod opener 121 may besimultaneously performed by transferring another pod 110 from therotating shelf 105 or the load port 114 by the pod transfer unit 118 inthe pod opener 121 located in the other side (lower end or upper end)while loading the wafer 200 into the boat 217 by the wafer transfer unit125 a in the pod opener 121 located in one side (upper end or lowerend).

When loading a predetermined number of wafers 200 into the boat 217, thelower end part of the processing furnace 202 may be opened by thefurnace gate valve 147. Continuously, the seal cap 219 may be moved upby the boat elevator 115, and the boat 217 supported by the seal cap 219may enter the substrate processing chamber in the processing furnace202.

After loading, a specified process may be performed on the wafer 200 inthe substrate processing chamber. After that, the boat 217 may exit theprocessing furnace 202 by the boat elevator 115. After that, the wafer200 and the pod 110 may exit to the outside of the case 111 in thereverse order of that described above.

Next, function blocks of the substrate processing apparatus 100 will bedescribed with reference to FIG. 3. FIG. 3 is a functional block diagramexemplarily illustrating a substrate processing apparatus according toan embodiment of the present invention. As shown in FIG. 3, a componentunit constituting the substrate processing apparatus 100 including amain memory unit 12, a transfer control unit 13, a temperature controlunit 14, a gas control unit 15, a programmable logic controller (PLC)unit 16, a data collecting and accumulating unit 30, an operation unit(not shown) receiving instructions of an operator, a display unit (notshown) displaying an operating screen or various data, etc., and so onmay be electrically connected to a main control unit 11 of the substrateprocessing apparatus 100. Specifically, the main control unit 11 and asubcontrol unit including the transfer control unit 13, the temperaturecontrol unit 14, the gas control unit 15, etc. may be connected by aprivate protocol such as Semiconductor Equipment and MaterialsInternational (SEMI) Equipment Communication Standard/High-speed SECSMessage Services (SECS/HSMS), or a general transmission controlprotocol/Internet protocol (TCP/IP), Extensible Markup Language/SimpleObject Access Protocol (XML/SOAP), etc.

The transfer control unit 13 may control a position of the pod transferunit 118, the wafer transfer instrument 125, or the boat elevator 115,etc., a photo sensor 21 or a pod sensor 22 may be electrically connectedto the transfer control unit 13, and for example, the transfer controlunit 13 may receive data regarding presence or a position of the pod 110accommodating the wafer 200 from the sensors, and transmit the receiveddata to the main control unit 11. Further, for example, the transfercontrol unit 13 may receive a transfer instruction of the pod 110 fromthe main control unit 11, and transfer the pod 110 to the location orposition instructed by the transfer instruction.

The temperature control unit 14 may control a temperature of a heaterheating the processing furnace 202, receive temperature data from atemperature sensor 23 measuring a temperature in the processing furnace202, and transmit the received temperature data to the main control unit11. In addition, for example, the temperature control unit 14 mayreceive a heating temperature instruction of the heater for increasingthe temperature in the processing furnace 202 from the main control unit11, and operate the heater to increase the temperature as instructedthrough the heating temperature instruction.

For example, the gas control unit 15 may transmit data received from avalve input/output (I/O) unit 24 or an interlock input/output (I/O) unit25 through the PLC unit 16 to the main control unit 11, and transmit thedata received from the main control unit 11 to the valve I/O unit 24 orthe interlock I/O unit 25. Specifically, for example, the gas controlunit 15 may receive gas flow data from a mass flow controller (MFC: aflow control unit) installed in a processing gas supply pipe forsupplying a processing gas in the processing furnace 202, and transmitthe received gas flow data to the main control unit 11. In addition, forexample, the gas control unit 15 may receive a gas control instructionsuch as a valve open and close instruction or a pump drive instruction,etc. with respect to an on-off valve installed in the processing gassupply pipe or a pressure adjustment valve or pump installed in aprocessing gas exhaust pipe exhausting the gas from the processingfurnace 202 from the main control unit 11, and perform gas controlaccording to the instruction. The PLC unit 16 may transmit data receivedfrom the valve I/O unit 24 or the interlock I/O unit 25 to the maincontrol unit 11, and also transmit data received from the main controlunit 11 to the valve I/O unit 24 or the interlock I/O unit 25. The mainmemory unit 12 may store a process recipe which is a substrateprocessing sequence of the substrate processing apparatus 100, andconsist of a hard disk, a semiconductor memory device, or the like.

The main control unit 11 may include a memory storing an operatingprogram of a central processing unit (CPU) and the main control unit 11as a hardware construction, and the CPU may read and operate to performthe process recipe stored in the main memory unit 12 according to theoperating program. Further, each of the transfer control unit 13, thetemperature control unit 14, the gas control unit 15, etc., which isincluded in the subcontrol unit, may also include a CPU and a memorystoring an operating program, etc. of each control unit, and each CPUmay operate according to the corresponding operating program.

The main control unit 11 may collect monitored data such as atemperature indicated by the temperature sensor or a position of anactuator, etc. from each subcontrol unit such as the transfer controlunit 13, etc. or each component unit such as the PLC unit 16, etc., andcontrol each component unit to set an apparatus parameter including atemperature or a pressure, etc. of the processing furnace 202 to apredetermined value using the monitored data. A state of the pod sensor22 or the temperature sensor 23, etc. may be transmitted from eachsubcontrol unit to the main control unit 11 as an analog signal or adigital signal through a recommended standard-232C (RS-232C) or a DeviceNet, etc. When the main control unit 11 collects the monitored data fromeach component unit, the main control unit 11 may mark a timestamp whichis a detection time of the collected monitored data on the collectedmonitored data, store and preserve the marked monitored data in anon-volatile memory device constituting the main memory unit 12, andalso transmit the marked monitored data to the data collecting andaccumulating unit 30.

Next, a management system will be described. For example, the datacollecting and accumulating unit 30 constituting the substrateprocessing apparatus 100 may be connected to the main control unit 11 bya file transfer protocol such as a SECS/HSMS or a file transfer protocol(FTP), or a network file sharing protocol, etc. Further, in an exampleof FIG. 3, the data collecting and accumulating unit 30 may beelectrically connected to an external input/output (I/O) unit 26, and beconfigured to collect a state of an external sensor through the externalI/O unit 26. The data collecting and accumulating unit 30 may receivethe monitored data collected from each component unit of the substrateprocessing apparatus 100 or the external I/O unit 26 from the maincontrol unit 11, and transmit the received monitored data to a hostcomputer which is the management computer of the substrate processingapparatus 100 or a group management computer managing a plurality ofsubstrate processing apparatuses 100.

In an example of FIG. 3, the data collecting and accumulating unit 30may be electrically connected to a database 34 which is an accumulativememory unit, a data storage server 40, and an analysis applicationapparatus 50 via a network 60. Further, as will be described later, thedatabase 34 may constitute a portion of the data collecting andaccumulating unit 30. The data collecting and accumulating unit 30 maycollect the monitored data from each component unit constituting theprocessing apparatus 100 via the main control unit 11, temporarily storethe collected monitored data, and accumulatively store the temporarilystored data in the database 34. Accordingly, it may be possible for themanagement computer (for example, the analysis application apparatus 50)to use the accumulatively stored data in the database 34. Further, in anembodiment of the present invention, although the data collecting andaccumulating unit 30 is installed inside the substrate processingapparatus 100 rather than the database 34, the data collecting andaccumulating unit 30 may be installed outside the substrate processingapparatus 100. Further, alternatively, the database 34 may be installedinside the substrate processing apparatus 100.

In the embodiment of the present invention, since the data collectingand accumulating unit 30 which is separated and independent from thesubstrate processing control system of the substrate processingapparatus 100 and collects only the monitored data may be installedinside the substrate processing apparatus 100, and the data collectingand accumulating unit 30 and the management system (the data storageserver 40, the analysis application apparatus 50) are connected,detailed monitored data which could not be acquired in a conventionalsubstrate processing control system may be acquired in the managementsystem, and be analyzed and used by the analysis application apparatus50. The data collecting and accumulating unit 30 will be described indetail later.

The data accumulated and stored in the database 34 may be transmitted toand stored in the non-volatile memory device of the data storage server40, etc. as needed, and data regarding a temperature, a gas flow rate,or a pressure, etc. of the preserved processing furnace 202 may be usedin data processing for monitoring the substrate processing apparatus 100such as statistical analysis or multivariate analysis, etc. by theanalysis application apparatus 50 having an advanced applicationfunction. The analysis application apparatus 50 may be constituted as apersonal computer (PC) connected to the network 60, or may beconstituted as a client-server type application apparatus or have aconstruction using a web browser, etc. Further, the analysis applicationapparatus 50 may be constituted independently from the network 60.

Next, functional blocks of the data collecting and accumulating unit 30according to an embodiment of the present invention will be describedwith reference to FIG. 4. FIG. 4 is a functional block diagramillustrating the data collecting and accumulating unit 30 according toan embodiment of the present invention. The data collecting andaccumulating unit 30 (data collecting and accumulating means) mayinclude a data collecting unit 31 (data collecting means), a cachememory 32 (temporary memory means) which is a temporary memory unit, adata accumulating unit 33 (data accumulating means), and an operationdisplay unit (not shown) receiving an input setting of instructions orvarious parameters, etc. from an operator with respect to the datacollecting and accumulating unit 30.

First, a summary of the data collecting and accumulating unit 30 will bedescribed. For example, the main control unit 11 or the external I/Ounit 26 may transmit each of monitored data to the data collecting unit31 when a value of the monitored data that each has collected is changedor a changed amount of the monitored data that each has collected isequal to or more than a predetermined limit. Investigations have shownthat an amount of the transmitted monitored data increases or decreasesaccording to an operation state of the substrate processing apparatus100. For example, when processing (producing) a substrate, since a largeamount of the monitored data is changed compared to when waiting, theamount of transmitted monitored data may be increased. Further, whileproducing, there may be a timing at which the amount of transmittedmonitored data is temporarily increased according to the operations of aprocess. Moreover, the amount of transmitted monitored data may beincreased by an increase of various sensors, etc. to improve performanceof the substrate processing apparatus 100. When the large amount ofmonitored data is stored in an HDD of the database 34 or the datastorage server 40, an access speed of the HDD may not catch up with thelarge amount and leakage of data accumulation may occur, or in the worstcase, a system down may occur.

Accordingly, it may be necessary to reduce the large amount of monitoreddata to a proper amount. At this time, the data collecting andaccumulating unit 30 may require flexibility which does not need achange of control software with respect to the increase of the monitoreddata. In this embodiment, the data collecting unit 31 may be providedwith a filtering function limiting a range of data needed with respectto the large amount of monitored data. The filtering function may beimplemented by a ticket distribution method as offered in a firstembodiment, etc. to be described later.

The data collecting unit 31 may receive a plurality of types ofmonitored data from the main control unit 11 or the external I/O unit26, and periodically write the received monitored data to the cachememory 32. The received monitored data may include a timestamp which isa detection time of the monitored data. Specifically, according to atotal amount of the received monitored data and a data writing upperlimit which is an upper limit of a total amount of the monitored datastored in the cache memory 32 during one period, the data collectingunit 31 may adjust an amount of each type of the monitored data writtento the cache memory 32, which is a temporary memory unit, allocate theadjusted amount to each type of the monitored data, and write each typeof the monitored data to the cache memory 32 based on the allocation.The data collecting unit 31 may have a filtering function limiting arange of data needed with respect to the large amount of monitored data.

Since the cache memory 32 is constituted as a semiconductor memory andwrites and reads data at a high speed compared to an HDD constitutingthe database 34 to be described later, the cache memory 32 may serve asa cushion when accumulating and preserving the large amount of monitoreddata in the database 34. The data accumulating unit 33 may read themonitored data written to the cache memory 32 in a predetermined time,and write the read monitored data to the database 34, which is anaccumulative memory unit.

Next, the data collecting unit 31 will be described in detail. As shownin FIG. 4, the data collecting unit 31 may include a monitored datareceiving unit 31 a (monitored data receiving means), a monitored datarate detection unit 31 b (monitored data rate detection means), amonitored data writing allocation unit 31 c (monitored data writingallocation means), a monitored data writing unit 31 d (monitored datawriting means), and a data collection and memory unit 31 e (datacollection and memory means).

The monitored data receiving unit 31 a may receive a plurality of typesof monitored data, for example, temperature data, pressure data, etc. ofthe processing furnace 202 and a detection time thereof, outputted fromthe substrate processing apparatus 100.

The monitored data rate detection unit 31 b may detect, as a monitoreddata rate, the total number of times each type of monitored datareceived by the monitored data receiving unit 31 a changes during afirst time period by more than a predetermined limit of change. Thefirst time period or the limit of the change may be set through adisplay unit of the data collecting and accumulating unit 30 by anoperator, and may be changeably stored in the data collection and memoryunit 31 e. For example, when the limit of change in pressure data is 100Pa and the pressure data is gradually changed from 100 Pa to 1100 Paover one second, the monitored data rate of the pressure data may be 10times/sec. Further, when the limit of change in temperature data is 10°C. and the temperature data is gradually changed from 500° C. to 600° C.over one second, the monitored data rate of the temperature data may be10 times/sec. Accordingly, when the monitored data is only two types ofthe pressure data and the temperature data, the monitored data rate maybe 20 times/sec. Further, in this embodiment, when the monitored datareceived by the monitored data receiving unit 31 a is changed by apredetermined change amount or more in a transmission side of the maincontrol unit 11 or the external I/O unit 26, the transmission side maybe configured to transmit the monitored data. Here, the transmissionside may always transmit the monitored data, and the monitored datareceiving unit 31 a may be configured to acquire the monitored datachanged by the predetermined change amount or more when receiving themonitored data in the monitored data receiving unit 31 a.

The monitored data writing allocation unit 31 c may allocate, to eachtype of the monitored data, the number of times each type of themonitored data of one period is written to the cache memory 32 during asecond time period based on the monitored data rate detected by themonitored data rate detection unit 31 b and the data writing upper limitwhich is an upper limit of a total amount of the monitored data storedin the cache memory 32 during the one period. Further, the monitoreddata writing allocation unit 31 c may allocate, to each type of themonitored data, the number of times each type of the monitored data ofthe one period is written to the cache memory 32 during the second timeperiod based on a priority of each type of the monitored data stored inthe data collection and memory unit 31 e to be described later togetherwith the data writing upper limit and the monitored data rate. Thesecond time period may be previously set through the display unit of thedata collecting and accumulating unit 30 by the operator, and may bechangeably stored in the data collection and memory unit 31 e.

Further, the monitored data writing allocation unit 31 c may performallocation such that the number of times a type of monitored data with ahigh priority is written to the cache memory 32 during the second timeperiod is greater than the number of times a type of monitored data witha low priority is written to the cache memory 32 during the second timeperiod based on the priority of each type of the monitored data storedin the data collection and memory unit 31 e. Moreover, the monitoreddata writing allocation unit 31 c may store the allocated number oftimes in the data collection and memory unit 31 e. In addition, thepriority may be previously set in the operation and display unit of thedata collecting and accumulating unit 30 by the operator, and may bechangeably stored in the data collection and memory unit 31 e.

For example, the amount of monitored data capable of being stored in thecache memory 32 during the one period may be 10 points/period, and thedata writing upper limit may be 10 points/sec when one period is onesecond. In this case, as described above, when the monitored data rateof each of the pressure data and the temperature data is 10 times/secand a total monitored data rate is 20 times/sec, the monitored datawriting allocation unit 31 c may allocate 5 times/sec to the number oftimes each of the pressure data and the temperature data is written thecache memory 32 in case of the pressure data and the temperature datahaving the same priority. However, the monitored data writing allocationunit 31 c may allocate different value to the number of times thepressure data and the temperature data written to the cache memory 32according to the priority when the pressure data and the temperaturedata have different priorities. A detailed description of this will bedescribed in embodiments to be described later.

The monitored data writing unit 31 d may write the plurality of types ofmonitored data received by the monitored data receiving unit 31 a to thecache memory 32 during the second time period based on the allocatednumber of times by the monitored data writing allocation unit 31 c.

The data collection and memory unit 31 e may store a ticket distributiontable which indicates the number of times each type of the monitoreddata is written to the cache memory 32 of one period during the secondtime period allocated to each type of the monitored data by themonitored data writing allocation unit 31 c. For example, as describedabove, the monitored data writing allocation unit 31 c may store apurpose when allocating 5 times/sec to the number of times each of thepressure data and the temperature data is written to the cache memory32. A detailed description of this will be described in a laterembodiment. Further, the data collection and memory unit 31 e may storethe priority of each of the plurality of types of monitored data usedwhen the monitored data writing allocation unit 31 c allocates thenumber of times each type of the monitored data is written. Further, thedata collection and memory unit 31 e may store the first time period,the limit of a change amount of the monitored data, and the second timeperiod described above.

Next, the data accumulating unit 33 will be described in detail. Asshown in FIG. 4, the data accumulating unit 33 may include anaccumulative data writing unit 33 a (accumulative data writing means), amonitoring unit 33 b (monitoring means), and an accumulative data memoryunit 33 c (data accumulation and memory means). The accumulative datawriting unit 33 a may read the monitored data which is periodicallywritten to the cache memory 32 of a plurality of periods for, forexample, every third time period, and write and accumulate the readmonitored data to the accumulative memory unit (database) 34 which isthe accumulative memory unit. The third time period may be previouslyset through the display unit of the data collecting and accumulatingunit 30 by the operator, may be changeably stored in the accumulativedata memory unit 33 c. For example, the monitored data may beperiodically written to the cache memory 32 every one second, thewritten monitored data for 10 periods may be read once every 10 seconds,and the read monitored data may be written and accumulated to thedatabase 34 which is the accumulative memory unit.

The monitoring unit 33 b may monitor an amount of accumulated datatransmitted from the cache memory 32 to the database 34 which is theaccumulative memory unit, and control the accumulative data writing unit33 a to extend a period of reading the monitored data stored in thecache memory 32 and writing the monitored data to the database 34 whichis the accumulative memory unit when the transmitted amount of theaccumulated data is determined to exceed a predetermined amount. Theaccumulative data memory unit 33 c may store the plurality of types ofmonitored data by matching the third period described above with theamount of the accumulated data transmitted from the cache memory 32 tothe database 34, which is the accumulative memory unit.

A First Embodiment

Next, a first embodiment will be described with reference to FIG. 5.FIG. 5 illustrates a monitored data writing allocation table during theone period (one second in the example of FIG. 5) stored in the datacollection and memory unit 31 e, which is a ticket distribution tablefor writing the monitored data during the one period (one second),according to the first embodiment of the present invention. The ticketdistribution may be the writing allocation. In FIG. 5, a priority may beset with respect to each of 2000 sensors transmitting the monitoreddata, and a ticket may be distributed, that is, the writing allocationwith respect to the cache memory 32 may be performed. The ticketdistribution is shown with check marks. For example, the tickets may bedistributed every 100 ms with respect to data transmitted from each ofsensors having sensor identifiers (IDs) 0001 to 0100 with a firstpriority, and the number of tickets corresponding to one period may be10 for each sensor. The tickets may be distributed to data transmittedfrom each of sensors having sensor IDs 0101 to 0106 of the secondpriority every 200 ms or 300 ms, and the number of tickets correspondingto one period may be 4 for each sensor. The tickets may be distributedto data transmitted from each of sensors having sensor IDs 1999 and 2000of the third priority for every 500 ms, and the number of ticketscorresponding to one period may be 2 for each sensor.

According to the ticket distribution table, data transmitted from thesensors having the sensor IDs 0001 to 0100, 0101, 0104, 0106, . . . maybe written to the cache memory 32 between 000 ms and 100 ms of oneperiod (one second), data transmitted from the sensors having the sensorIDs 0001 to 0100, 0102, 0105, . . . may be written to the cache memory32 between 100 ms and 200 ms of one period (one second), similarly, datatransmitted from corresponding sensors may be written to the cachememory 32 for every 100 ms between 200 ms and 900 ms of the one period(one second), and lastly, data transmitted from sensors having sensorIDs 0001 to 0100, 0103, 0105, . . . may be written to the cache memory32 between 900 ms and 1000 ms. In the first embodiment, the ticketdistribution method may be used in order to filter the monitored datawritten to the cache memory 32.

In the first embodiment, prerequisites may be set as follows. (1) Theremay be 2000 sensors transmitting the monitored data, and the sensor IDsmay be 0001 to 2000.

(2) A period of writing the monitored data from the 2000 sensors to thecache memory 32 may be one second. That is, after writing the monitoreddata of an amount corresponding to the ticket distributed based on theticket distribution to the cache memory 32, a period until the monitoreddata of an amount corresponding to the ticket distributed based on anext ticket distribution is written to the cache memory 32 may be onesecond. (3) A data writing upper limit of the cache memory 32 may be5000 points/sec. That is, the write of data to the cache memory 32 maybe performed a maximum of 5000 times a second. The data writing upperlimit may be determined by the cache memory 32 or a central processingunit (CPU), etc. which writes the data to the cache memory 32.Accordingly, there may be 5000 tickets distributing write timing ofmonitored data to the cache memory 32. (4) Data with the first prioritymay be data transmitted from sensors having sensor IDs 0001 to 0100, anda change of the data may be recorded in the cache memory 32.

Under the prerequisites described above, in the embodiment of FIG. 5,the monitored data rate detection unit 31 b may accumulate a monitoreddata rate, which is monitored data collection points per period (onesecond), for every one period (one second) which is the first timeperiod, and the monitored data writing allocation unit 31 c may allocateand distribute the ticket of an amount corresponding to one period (onesecond) which is the second time period with respect to each monitoreddata of a next one period (one second) based on the accumulatedmonitored data rate. A detailed description of the accumulation of themonitored data rate and the ticket distribution is as follows. (1) In anembodiment of FIG. 5, since each type of the monitored data from 2000sensors changes by the predetermined change amount or more for every 100ms, the monitored data rate is 2000×1 sec/0.1 sec=20000/sec. Forexample, since the pressure data of the processing furnace 202 ischanged to 1000 Pa for one second, the change equal to or more than 100Pa which is the predetermined change amount may be repeated every 100ms.

(2) The data with the first priority may be data transmitted from thesensors having the sensor IDs 0001 to 0100, and since every change ofthe data may be written to the cache memory 32, the data with the firstpriority may be updated every 100 ms, that is, may be written to thecache memory 32 every 100 ms. Accordingly, since 10 tickets per one typeof data are distributed to the data with the first priority, the 1000tickets may be distributed to every type of data with the firstpriority. Further, the data with the first priority may be previouslyregistered in the data collection and memory unit 31 e from theoperation and display unit of the collecting and accumulating unit 30 bythe operator, and the monitored data writing allocation unit 31 c maydistribute the tickets based on the registered data with the firstpriority.

(3) The data with other priorities than the first priority may be datatransmitted from the sensors having sensor IDs 0101 to 2000, and theremaining 4000 tickets may be allocated to the data with the otherpriorities at equal time intervals by a round robin method after theallocation in (2) above. Accordingly, since 2 tickets per one type ofdata are distributed to data excluding the data transmitted from thesensors with the first priority, 3800 tickets may be distributed toevery type of data excluding the data transmitted from the sensors withthe first priority. Accordingly, a total of 4800 (1000+3800) tickets maybe distributed, and 200 tickets may remain.

(4) Further, after the allocation in (3) above, the 200 remainingtickets may be allocated to data excluding the data transmitted from thesensors with the first priority in increasing order of the sensor IDs tohave as similar time intervals as possible. The data to which theremaining tickets are allocated may be data with the second priority,and data to which the remaining tickets are not allocated may be datawith the third priority. In the embodiment of FIG. 5, since the 200remaining tickets are allocated to each of 100 types of data transmittedfrom the sensors having the sensor IDs 0101 to 0200 by twos, the datawith the second priority may be data transmitted from the sensors havingthe sensor IDs 0101 to 0200 and the data with the third priority may bedata (1800 data) transmitted from the sensors having the sensor IDs 0201to 2000. Further, in the embodiment of FIG. 5, the remaining tickets maybe allocated to data (100 types of data) transmitted from the sensorshaving the sensor IDs 0101 to 0200 by twos, or it may be possible forthe remaining tickets to be allocated to data (200 types of data)transmitted from the sensors having the sensor IDs 0101 to 0300 by ones.

The calculated ticket distribution may be stored in the data collectionand memory unit 31 e as a ticket distribution table, and when the ticketdistribution is performed, the monitored data writing unit 31 d maywrite monitored data of a next period to the cache memory 32 after theticket distribution is performed based on the ticket distribution tablestored in the data collection and memory unit 31 e. Further, in theembodiment of FIG. 5, when the ticket distribution is not performed, themonitored data writing unit 31 d may not write the monitored data to thecache memory 32. Since the monitored data rate of each period is notabruptly changed, it may not be bad to write the monitored data of anext period to the cache memory 32 after the ticket distribution isperformed. Further, in this embodiment, a monitored data rate may becalculated from the received monitored data during the one period, andthe ticket distribution may be stopped for the next one period (onesecond) based on the calculated monitored data rate. That is, thereceived monitored data during the one period (one second) may betemporarily stored in a buffer memory, the monitored data rate may becalculated from the monitored data stored in the buffer memory, and thetickets with respect to the monitored data stored in the buffer memorymay be distributed based on the calculated monitored data rate.Accordingly, the buffer memory may be required, but, the tickets may bemore accurately distributed.

Thus, the write of the monitored data may be sequentially and repeatedlyperformed every period for 10 periods (10 seconds), and the monitoreddata for a total of 10 periods may be written to the cache memory 32.Next, the accumulative data writing unit 33 a may read the monitoreddata for 10 periods stored in the cache memory 32 every 10 periods, thatis, every 10 seconds, after performing a data compression process to theread monitored data and write and accumulate the compressed monitoreddata to the database 34, which is an accumulative memory unit consistingof a non-volatile memory such as an HDD, etc. via the network 60. Atthis time, the monitoring unit 33 b may monitor an amount of theaccumulated data transmitted from the cache memory 32 to the database34, and when the transmitted amount of accumulated data is determined tobe exceeded a predetermined amount, the monitoring unit 33 b controlsthe accumulative data writing unit 33 a to extend a period in which themonitored data written to the cache memory 32 is read and writes themonitored data to the database 34 according to the amount of theaccumulated data transmitted to the database 34. Accordingly, the systemdown, etc. due to the transmitted amount of accumulated data exceeding apredetermined amount can be prevented. Thus, the write of the monitoreddata may be sequentially and repeatedly performed every one period for10 periods (for 10 seconds), and a data collection operation ofoverwriting the monitored data for a total of 10 periods to the cachememory 32 and a data accumulation operation of reading the monitoreddata for 10 periods written to the cache memory 32 every 10 seconds andwriting and accumulating the read monitored data to the database 34 maybe repeated and performed.

In addition, in this embodiment, the accumulative data writing unit 33 amay read the monitored data of 10 periods written to the cache memory 32every time (10 seconds) corresponding to 10 periods, and may write theread monitored data to the database 34. The accumulative data writingunit 33 a may also be configured to read the monitored data during theone period written to the cache memory 32 every time (1 second)corresponding to one period and write the read monitored data to thedatabase 34, or read monitored data for any given period written to thecache memory 32 every arbitrary period, and to write the read monitoreddata to the database 34.

Moreover, in this embodiment, when instrument parameters indicating atemperature setting value, a pressure setting value, etc. are input bythe operator or the processing recipe, the indicated instrumentparameters such as the temperature setting value and the pressuresetting value, etc. together with an indicated time may be received atthe monitored data receiving unit 31 a, for example, may be written toanother cache memory other than the cache memory 32, and the indicatedtime of the instrument parameters and the instrument parameters may beread from the other cache memory and written and preserved to thedatabase 34. In this way, the analysis application apparatus 50, etc.may compare and analyze a generation time of the monitored datareceiving at the monitored data receiving unit 31 a and the indicatedtime of the instrument parameters.

As described above, in this embodiment, the total number of times eachtype of monitored data is changed by the predetermined change amount ormore every one period (one second) which is the first time period may becalculated as a monitored data rate, the tickets may be assigned anddistributed as the number of times each type of the monitored data iswritten to the cache memory 32 during the one period for one secondwhich is the second time period based on the calculated monitored datarate and a data writing upper limit which is an amount of monitored datacapable of being written to the cache memory 32 during the one period,and the monitored data during the one period may be written to the cachememory 32 for one second which is the second time period based on theassigned tickets. The write of the monitored data may be repeatedlyperformed for 10 periods (10 seconds), and the monitored data of a totalof 10 periods may be written to the cache memory 32. Accordingly, themonitored data for 10 continuous periods in time sequence may be writtento the cache memory 32 of this embodiment. The monitored data of 10periods written to the cache memory 32 may be read whenever the thirdtime period which is equal to 10 periods elapses, that is, read every 10seconds, and written and accumulated to the database 34 which is theaccumulative memory unit.

A Second Embodiment

Next, a second embodiment will be described with reference to FIG. 6.FIG. 6 illustrates a monitored data writing allocation table during theone period (one second in the example of FIG. 6) stored in the datacollection and memory unit 31 e, which is a ticket distribution tablefor writing the monitored data during the one period (one second),according to the second embodiment of the present invention. In FIG. 6,the priority may be set with respect to each of 500 sensors transmittingthe monitored data, and tickets may be distributed. The ticketdistribution is shown with check marks. In the embodiment of FIG. 6, thetickets may be distributed every 100 ms with respect to data transmittedfrom every sensor having the order of priorities 1 to 3, and 5000tickets may be distributed during the one period.

In the second embodiment, prerequisites may be set as follows. (1) Theremay be 500 sensors transmitting the monitored data, and the sensor IDsmay be 0001 to 0500. (2) A period of writing the monitored datatransmitted from the 500 sensors to the cache memory 32 may be onesecond. That is, after writing every type of monitored datacorresponding to the tickets distributed based on the ticketdistribution to the cache memory 32, a period until the monitored dataof an amount corresponding to the tickets distributed based on a nextticket distribution is written to the cache memory 32 may be one second.(3) A data writing upper limit of the cache memory 32 may be 5000points/sec. That is, the write of the data to the cache memory 32 may beperformed a maximum of 5000 times in one second. The data writing upperlimit may be determined by the cache memory 32 or a central processingunit (CPU) which writes the data to the cache memory 32. Accordingly,there may be 5000 tickets distributing a monitored data writing timingto the cache memory 32. (4) Data with the first priority may be datatransmitted from the sensor having a sensor ID beginning from 0001, anda change of the data may be written to the cache memory 32.

In the second embodiment, a detailed description of the accumulation ofthe monitored data rate and the ticket distribution is as follows. Inthe embodiment of FIG. 6, since each type of monitored data from 500sensors changes by the predetermined change amount or more for every 100ms, the monitored data rate is 500×1 sec/0.1 sec=5000/sec. This may beequal to 5000 points/sec which is a data writing upper limit of thecache memory 32, and may be equal to or less than the data writing upperlimit. Accordingly, every type of monitored data transmitted from the500 sensors may be written to the cache memory 32. As a result, 10tickets per one type of data may be distributed to the monitored datatransmitted from the 500 sensors.

The calculated ticket distribution may be stored in the data collectionand memory unit 31 e, and when the ticket distribution is performed, themonitored data writing unit 31 d may write monitored data of a nextperiod to the cache memory 32 after the ticket distribution is performedbased on the ticket distribution stored in the data collection andmemory unit 31 e. Thus, the write of the monitored data may besequentially and repeatedly performed every period for 10 periods (10seconds), and the monitored data for a total of 10 periods may bewritten to the cache memory 32.

Next, the accumulative data writing unit 33 a may read the monitoreddata for 10 periods written to the cache memory 32 every 10 periods,that is, every 10 seconds, and after performing a data compressionoperation, etc. to the read monitored data, write and accumulate thecompressed data to the database 34 which is the accumulative memory unitconsisting of a non-volatile memory such as an HDD, etc. via the network60.

A Third Embodiment

Next, a third embodiment will be described with reference to FIG. 7.FIG. 7 illustrates a monitored data writing allocation table during theone period (one second in the example of FIG. 7) stored in the datacollection and memory unit 31 e, which is a ticket distribution tablefor writing the monitored data during the one period (for one second),according to the third embodiment of the present invention. In FIG. 7,the priority may be set with respect to each of 1500 sensorstransmitting the monitored data, and tickets are distributed. The ticketdistribution is shown with check marks.

For example, the tickets may be distributed to data transmitted from thesensor having a sensor ID 0001 of the first priority every 100 ms, andthe number of tickets during the one period may be 10 for each data. Thetickets may be distributed to data transmitted from each of sensorshaving sensor IDs 0002 to 0006 of the second priority every 200 ms or300 ms, and the number of tickets during the one period may be 4 foreach type of data. The tickets may be distributed to data transmittedfrom each sensor having one of sensor IDs 1499 and 1500 of the thirdpriority every 300 ms or 400 ms, and the number of tickets during theone period may be 3 for each type of data.

In the third embodiment, prerequisites may be set as follows. (1) Theremay be 1500 sensors transmitting the monitored data, and the sensor IDsmay be 0001 to 1500. (2) A period of writing the monitored datatransmitted from the 1500 sensors to the cache memory 32 may be onesecond. That is, after writing every type of monitored data of an amountcorresponding to the tickets distributed based on the ticketdistribution to the cache memory 32, a period until the monitored dataof an amount corresponding to the tickets distributed based on a nextticket distribution is written to the cache memory 32 may be one second.(3) A data writing upper limit of the cache memory 32 may be 5000points/sec. That is, the write of the data may be performed at most 5000times in the cache memory 32 in one second. The data writing upper limitmay be determined by the cache memory 32 or a central processing unit(CPU), etc. which writes the data to the cache memory 32. Accordingly,there may be 5000 tickets distributing a monitored data writing timingto the cache memory 32. (4) Data with first priority may be datatransmitted from the sensor having the sensor ID 0001, and a change ofthe data may be recorded in the cache memory 32.

Under the prerequisites described above, in the embodiment of FIG. 7,the monitored data rate detection unit 31 b may accumulate a monitoreddata rate which is monitored data collection points per one period (onesecond) every one period (one second), and the monitored data writingallocation unit 31 c may allocate and distribute the ticketscorresponding to one period (one second) to each type of monitored dataof a next one period (one second) based on the accumulated monitoreddata rate. A detailed description of the accumulation of the monitoreddata rate and the ticket distribution is as follows. (1) In anembodiment of FIG. 7, since each type of the monitored data from 1500sensors changes by the predetermined change amount or more for every 100ms, the monitored data rate is 1500×1 sec/0.1 sec=15000/sec.

(2) The data with the first priority may be data transmitted from thesensor having the sensor ID 0001, and since every change of the data maybe written to the cache memory 32, the data transmitted from the sensorwith the first priority may be updated every 100 ms, that is, be writtento the cache memory 32 every 100 ms. Accordingly, 10 tickets may bedistributed to the data transmitted from the sensor with the firstpriority.

(3) Data excluding the data transmitted from the sensor with the firstpriority may be 1499 types of data transmitted from the sensors havingsensor IDs 0002 to 1500, and the 4990 remaining tickets may be allocatedto the 1499 types of data at equal time intervals by a round robinmethod after the allocation in (2) above. Accordingly, since 3 ticketsare distributed to each type of data excluding the data transmitted fromthe sensor with the first priority, 4497 tickets (1499×3=4497) may bedistributed to every type of data excluding the data transmitted fromthe sensor with the first priority.

(4) Further, after the allocation in (3) above, the 493(5000-10-4497=493) remaining tickets may be allocated to data excludingthe data transmitted from the sensor with the first priority inincreasing order of the sensor IDs to have as similar time intervals aspossible. The data to which the remaining tickets are allocated may bedata with the second priority, and data to which the remaining ticketsare not allocated may be data with the third priority. In the embodimentof FIG. 7, since the 493 remaining tickets are allocated to each type ofdata (493) from sensors having the sensor IDs 0002 to 0494 by ones, thedata with the second priority may be data transmitted from sensorshaving sensor IDs 0002 to 0494, and the data with the third priority maybe data (1006) transmitted from sensors having sensor IDs 0495 to 1500.

The calculated ticket distribution may be stored in the data collectionand memory unit 31 e, and when the ticket distribution is performed, themonitored data writing unit 31 d may write monitored data of a nextperiod to the cache memory 32 after the ticket distribution is performedbased on the ticket distribution stored in the data collection andmemory unit 31 e. Accordingly, the write of the monitored data may besequentially and repeatedly performed for 10 periods (10 seconds), andthe monitored data for a total of 10 periods may be written to the cachememory 32.

Next, the accumulative data writing unit 33 a may read the monitoreddata for 10 periods written to the cache memory 32 every 10 periods,that is, every 10 seconds, and after performing a data compressionoperation, etc. to the read monitored data, write and accumulate thecompressed data to the database 34 which is an accumulative memory unitconsisting of a non-volatile memory such as an HDD, etc. via the network60.

According to the embodiments described above, effects of the following(1) to (4) may be obtained. (1) Since the ticket distribution isperformed based on the data writing upper limit capable of being storedin the temporary memory unit and the monitored data rate, even when theamount of monitored data from the sensors is increased, it is possibleto set an amount of the monitored data capable of being stored in thetemporary memory unit as a proper value, and to respond to an increaseof an amount of the monitored data from the sensors. Accordingly,leakage of data accumulation or a system down can be prevented. (2)Since the number of times (storing frequency) a type of monitored datawith high priority is written to the temporary memory unit is greaterthan the number of times (storing frequency) a type of monitored datawith low priority is written to the temporary memory unit, it ispossible to optimize an amount of the monitored data stored in thetemporary memory unit according to the priority of the monitored data.(3) A first number of times (a first storing frequency) the monitoreddata with the first priority is written to the temporary memory unit isallocated to the monitored data with the first priority, a second numberof times (a second storing frequency) the monitored data with the secondpriority and the third priority is written, which is the differencebetween the data writing upper limit and the first number of times, isallocated to the monitored data with the second priority and the thirdpriority, and a third number of times (a third storing frequency) themonitored data with the second priority is written, which is thedifference between the data writing upper limit and a sum of the firstnumber of times and the second number of times, is allocated to themonitored data with the second priority. Therefore, it may be possibleto optimize an amount of data stored in the temporary memory unitaccording to the priority of the monitored data, and the tickets may beused with none remaining since the total number of distributed ticketsmay be equal to the data writing upper limit. (4) When the amount of theaccumulated data transmitted from the temporary memory unit to theaccumulation and memory unit exceeds the predetermined amount, a periodof reading the monitored data from the temporary memory unit and writingthe read monitored data to the accumulative memory unit is extended.Therefore, the system down occurring when the transmitted amount of theaccumulated data exceeds the predetermined amount is prevented.

The present invention is not limited to the embodiments, and it will beapparent to those skilled in the art that various modifications can bemade to the above-described embodiments of the present invention withoutdeparting from the spirit or scope of the invention. The data collectingand accumulating unit 30 is disposed in the substrate processingapparatus in the above-described embodiments, and it may be disposedoutside the substrate processing apparatus. For example, the datacollecting and accumulating unit 30 may be connected to the substrateprocessing apparatus installed inside a clean room using a LAN, or bedisposed as a management apparatus outside the clean room. The presentinvention may be applied to not only a semiconductor manufacturingapparatus, but also an apparatus for processing a glass substrate suchas a liquid crystal display (LCD) apparatus, or another substrateprocessing apparatus. The processing of the substrate may be a filmforming process of performing chemical vapor deposition (CVD), physicalvapor deposition (PVD), atomic layer deposition (ALD), and forming anepitaxial growth film, an oxide film, a nitride film, a metal-containingfilm, etc., an annealing process, an oxidation process, a diffusionprocess, an etching process, an exposure process, a photolithographyprocess, a coating process, a molding process, a developing process, adicing process, a wire bonding process, an inspection process, etc.

According to the present invention, even when an amount of monitoreddata is increased from a sensor, leakage of data accumulation and asystem down can be prevented.

A substrate processing system for collecting and accumulating variousmonitored data, for example, monitored data such as a processingtemperature or a pressure in a processing chamber, etc., which isoutputted from a substrate processing apparatus processing a substrate,for example, a semiconductor wafer is provided.

Preferred embodiments of the present invention are added.

(Supplementary Note 1)

According to one embodiment of the present invention, there is provideda substrate processing system including a substrate processing apparatusconfigured to process a substrate;

a monitored data receiving unit configured to receive a plurality oftypes of monitored data outputted from the substrate processingapparatus;

a temporary memory unit configured to periodically store the pluralityof types of monitored data received by the monitored data receivingunit;

a monitored data rate detection unit configured to detect, as amonitored data rate, a total number of times each type of monitored datareceived by the monitored data receiving unit changes during a firsttime period by more than a predetermined amount;

a monitored data writing allocation unit configured to allocate, to eachtype of monitored data, a storing frequency corresponding to number oftimes each type of monitored data of one period is written to thetemporary memory unit during a second time period based on the monitoreddata rate detected by the monitored data rate detection unit and anupper limit of the storing frequency corresponding to a total storingfrequency of the monitored data stored in the temporary memory unitduring the one period;

a monitored data writing unit configured to write the plurality of typesof monitored data received by the monitored data receiving unit to thetemporary memory unit during the second time period based on the storingfrequency allocated by the monitored data writing allocation unit;

an accumulative memory unit configured to store the plurality of typesof monitored data stored in the temporary memory unit for a plurality ofperiods; and

an accumulative data writing unit configured to read the plurality oftypes of monitored data stored in the temporary memory unit for everythird time period and to store the monitored data in the accumulativememory unit.

Here, the first time period and the second time period may be equal. Thesecond time period and the third time period may be equal. However, itmay be desirable that the third time period be greater than the secondtime period to reduce the amount of data transmitted from the temporarymemory unit to the accumulative memory unit.

(Supplementary Note 2)

In the substrate processing system of Supplementary note 1, thesubstrate processing system may further include a priority memory unitconfigured to store a priority of each type of monitored data forwriting the plurality of types of monitored data to the temporary memoryunit,

wherein the monitored data writing allocation unit allocates a higherstoring frequency to a type of monitored data with high priority forwriting to the temporary memory unit during the second time period and alower storing frequency to a type of monitored data with low priorityfor writing to the temporary memory unit during the second time period,based on the priority of each type of monitored data stored in thepriority memory unit.

(Supplementary Note 3)

In the substrate processing system of Supplementary note 1, wherein thesubstrate processing system may further include a priority memory unitconfigured to store a priority of each type of monitored data when theplurality of types of monitored data are stored into the temporarymemory unit,

wherein the monitored data writing allocation unit allocates the storingfrequency for writing the plurality of types of monitored data to thetemporary memory unit during the second time period, based on the upperlimit of the storing frequency, the monitored data rate and the prioritystored in the priority memory unit.

(Supplementary Note 4)

In the substrate processing system of the supplementary note 3, it ispreferable that the priority of each type of monitored data is one of afirst priority, a second priority and a third priority, and

the monitored data writing allocation unit allocates a first storingfrequency to a type of monitored data with the first priority, a secondstoring frequency to a type of monitored data with the second priorityand a type of monitored data with the third priority wherein the secondstoring frequency is equal to or less than a difference between thefirst storing frequency and the upper limit of the storing frequency,and a third storing frequency to the type of monitored data with thesecond priority wherein the third storing frequency is equal to adifference between the upper limit of the storing frequency and a sum ofthe first storing frequency and the second storing frequency.

(Supplementary Note 5)

In the substrate processing system of any one of Supplementary notes 1to 4, the substrate processing system may further include a monitoringunit configured to monitor an amount of accumulated data transmittedfrom the temporary memory unit to the accumulative memory unit,

wherein the accumulative data writing unit is configured to extend aperiod of storing the plurality of types of monitored data in thetemporary memory unit to the accumulative memory unit when themonitoring unit determines the amount of accumulated data is greaterthan a predetermined amount.

(Supplementary Note 6)

According to another embodiment of the present invention, there isprovided a monitored data collection and accumulative system, including:

a monitored data receiving unit configured to receive a plurality oftypes of monitored data outputted from the outside;

a substrate processing apparatus configured to process a substrate;

a monitored data receiving unit configured to receive a plurality oftypes of monitored data outputted from the substrate processingapparatus;

a temporary memory unit configured to periodically store the pluralityof types of monitored data received by the monitored data receivingunit;

a monitored data rate detection unit configured to detect, as amonitored data rate, a total number of times each type of monitored datareceived by the monitored data receiving unit changes during a firsttime period by more than a predetermined amount;

a monitored data write allocation unit configured to allocate, to eachtype of monitored data, a storing frequency corresponding to number oftimes each type of monitored data of one period is written to thetemporary memory unit during a second time period based on the monitoreddata rate and an upper limit of the storing frequency corresponding to atotal storing frequency of the plurality of types of monitored datastored in the temporary memory unit during the one period;

a monitored data writing unit configured to write the plurality of typesof monitored data received by the monitored data receiving unit to thetemporary memory unit during the second time period based on the storingfrequency;

an accumulative memory unit configured to accumulatively store theplurality of types of monitored data stored in the temporary memory unitfor a plurality of periods; and

an accumulative data writing unit configured to read the plurality oftypes of monitored data stored in the temporary memory unit for everythird time period and to store the monitored data in the accumulativememory unit.

(Supplementary Note 7)

According to still another embodiment of the present invention, there isprovided a monitored data collecting and accumulating method or programof a substrate processing system, including:

(a) receiving a plurality of types of monitored data outputted from asubstrate processing apparatus configured to process a substrate;

(b) detecting, as a monitored data rate, a total number of times eachtype of monitored data received in the step (a) changes during a firsttime period by more than a predetermined amount;

(c) allocating, to each type of monitored data, a storing frequencycorresponding to number of times each type of monitored data of oneperiod is written to a temporary memory unit during a second time periodbased on the monitored data rate detected in the step (b) and an upperlimit of the storing frequency corresponding to a total storingfrequency of the plurality of types of monitored data stored in thetemporary memory unit during the one period;

(d) writing the plurality of types of monitored data outputted from thesubstrate processing apparatus to the temporary memory unit during thesecond time period based on the storing frequency allocated in the step(c); and

(e) reading the plurality of types of monitored data from the temporarymemory unit for every third time period and writing the plurality oftypes of monitored data to the accumulative memory unit.

(Supplementary Note 8)

According to yet another embodiment of the present invention, there isprovided a substrate processing apparatus, including:

a main control unit;

a monitored data receiving unit configured to receive a plurality oftypes of monitored data outputted from the main control unit;

a temporary memory unit configured to periodically store the pluralityof types of monitored data received by the monitored data receivingunit;

a monitored data rate detection unit configured to detect, as amonitored data rate, a total number of times each type of monitored datareceived by the monitored data receiving unit changes during a firsttime period by more than a predetermined amount;

a monitored data writing allocation unit configured to allocate, to eachtype of monitored data, a storing frequency corresponding to number oftimes each type of monitored data of one period is written to thetemporary memory unit during a second time period based on the monitoreddata rate detected by the monitored data rate detection unit and anupper limit of the storing frequency corresponding to a total storingfrequency of the monitored data stored in the temporary memory unitduring the one period;

a monitored data writing unit configured to write the plurality of typesof monitored data received by the monitored data receiving unit to thetemporary memory unit during the second time period based on the storingfrequency allocated by the monitored data writing allocation unit;

an accumulative memory unit configured to store the plurality of typesof monitored data stored in the temporary memory unit for a plurality ofperiods; and

an accumulative data writing unit configured to read the plurality oftypes of monitored data stored in the temporary memory unit for everythird time period and to store the monitored data in the accumulativememory unit.

(Supplementary Note 9)

In the substrate processing apparatus of Supplementary note 8, thesubstrate processing apparatus may further include a priority memoryunit configured to store a priority of each type of monitored data forwriting the plurality of types of monitored data to the temporary memoryunit,

wherein the monitored data writing allocation unit allocates a higherstoring frequency to a type of monitored data with high priority higherfor writing the plurality of types of monitored data to the temporarymemory unit during the second time period and a lower storing frequencyto a type of monitored data with low priority for writing the pluralityof types of monitored data to the temporary memory unit during thesecond time period, based on the priority stored in the priority memoryunit.

(Supplementary Note 10)

In the substrate processing apparatus of Supplementary note 8, thesubstrate processing apparatus may further include a priority memoryunit configured to store a priority of each type of monitored data forwriting the plurality of types of monitored data to the temporary memoryunit,

wherein the monitored data writing allocation unit allocates the storingfrequency for writing the plurality of types of monitored data to thetemporary memory unit during the second time period, based on the upperlimit of the storing frequency, the monitored data rate and the prioritystored in the priority memory unit.

(Supplementary Note 11)

In the substrate processing apparatus of Supplementary note 10, thepriority of each type of monitored data may be one of a first priority,a second priority and a third priority, and

the monitored data writing allocation unit may allocate a first storingfrequency to a type of monitored data with the first priority, a secondstoring frequency to a type of monitored data with the second priorityand a type of monitored data with the third priority wherein the secondstoring frequency is equal to or less than a difference between thefirst storing frequency and the upper limit of the storing frequency,and a third storing frequency to the type of monitored data with thesecond priority wherein the third storing frequency is equal to adifference between the upper limit of the storing frequency and a sum ofthe first storing frequency and the second storing frequency.

(Supplementary Note 12)

In the substrate processing apparatus of any one of Supplementary notes8 to 10, the substrate processing apparatus may further include:

a monitoring unit configured to monitor an amount of accumulated datatransmitted from the temporary memory unit to the accumulative memoryunit,

wherein the accumulative data writing unit is configured to extend aperiod of storing the plurality of types of monitored data in thetemporary memory unit to the accumulative memory unit when themonitoring unit determines the amount of accumulated data is greaterthan a predetermined amount.

What is claimed is:
 1. A substrate processing system comprising: a substrate processing apparatus configured to process a substrate; a monitored data receiving unit configured to receive a plurality of types of monitored data outputted from the substrate processing apparatus; a temporary memory unit configured to periodically store the plurality of types of monitored data received by the monitored data receiving unit; a monitored data rate detection unit configured to detect, as a monitored data rate, a total number of times each type of monitored data received by the monitored data receiving unit changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit configured to allocate, to each type of monitored data, a storing frequency corresponding to number of times each type of monitored data of one period is written to the temporary memory unit during a second time period based on the monitored data rate detected by the monitored data rate detection unit and an upper limit of the storing frequency corresponding to a total storing frequency of the monitored data stored in the temporary memory unit during the one period; a monitored data writing unit configured to write the plurality of types of monitored data received by the monitored data receiving unit to the temporary memory unit during the second time period based on the storing frequency allocated by the monitored data writing allocation unit; an accumulative memory unit configured to store the plurality of types of monitored data stored in the temporary memory unit for a plurality of periods; and an accumulative data writing unit configured to read the plurality of types of monitored data stored in the temporary memory unit for every third time period and to store the monitored data in the accumulative memory unit.
 2. A substrate processing apparatus comprising: a main control unit; a monitored data receiving unit configured to receive a plurality of types of monitored data outputted from the main control unit; a temporary memory unit configured to periodically store the plurality of types of monitored data received by the monitored data receiving unit; a monitored data rate detection unit configured to detect, as a monitored data rate, a total number of times each type of monitored data received by the monitored data receiving unit changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit configured to allocate, to each type of monitored data, a storing frequency corresponding to number of times each type of monitored data of one period is written to the temporary memory unit during a second time period based on the monitored data rate detected by the monitored data rate detection unit and an upper limit of the storing frequency corresponding to a total storing frequency of the monitored data stored in the temporary memory unit during the one period; a monitored data writing unit configured to write the plurality of types of monitored data received by the monitored data receiving unit to the temporary memory unit during the second time period based on the storing frequency allocated by the monitored data writing allocation unit; an accumulative memory unit configured to store the plurality of types of monitored data stored in the temporary memory unit for a plurality of periods; and an accumulative data writing unit configured to read the plurality of types of monitored data stored in the temporary memory unit for every third time period and to store the monitored data in the accumulative memory unit.
 3. The substrate processing system of claim 1, further comprising: a priority memory unit configured to store a priority of each type of monitored data for writing the plurality of types of monitored data to the temporary memory unit, wherein the monitored data writing allocation unit allocates a higher storing frequency to a type of monitored data with high priority for writing to the temporary memory unit during the second time period and a lower storing frequency to a type of monitored data with low priority for writing to the temporary memory unit during the second time period, based on the priority of each type of monitored data stored in the priority memory unit.
 4. The substrate processing system of claim 1, further comprising: a priority memory unit configured to store a priority of each type of monitored data for writing the plurality of types of monitored data to the temporary memory unit, wherein the monitored data writing allocation unit allocates the storing frequency for writing the plurality of types of monitored data to the temporary memory unit during the second time period, based on the upper limit of the storing frequency, the monitored data rate and the priority stored in the priority memory unit.
 5. The substrate processing system of claim 4, wherein the priority of each type of monitored data is one of a first priority, a second priority and a third priority, and the monitored data writing allocation unit allocates a first storing frequency to a type of monitored data with the first priority, a second storing frequency to a type of monitored data with the second priority and a type of monitored data with the third priority wherein the second storing frequency is equal to or less than a difference between the first storing frequency and the upper limit of the storing frequency, and a third storing frequency to the type of monitored data with the second priority wherein the third storing frequency is equal to a difference between the upper limit of the storing frequency and a sum of the first storing frequency and the second storing frequency.
 6. The substrate processing system of claim 1, further comprising: a monitoring unit configured to monitor an amount of accumulated data transmitted from the temporary memory unit to the accumulative memory unit, wherein the accumulative data writing unit is configured to extend a period of storing the plurality of types of monitored data in the temporary memory unit to the accumulative memory unit when the monitoring unit determines the amount of accumulated data is greater than a predetermined amount.
 7. A non-transitory computer-readable recording medium storing a program for collecting and accumulating monitored data, the program comprising: (a) receiving a plurality of types of monitored data outputted from a substrate processing apparatus configured to process a substrate; (b) detecting, as a monitored data rate, a total number of each type of monitored data received in the step (a) changes during a first time period by more than a predetermined amount; (c) allocating, to each type of monitored data, a storing frequency corresponding to number of times each type of monitored data of one period is written to a temporary memory unit during a second time period based on the monitored data rate detected in the step (b) and an upper limit of the storing frequency corresponding to a total storing frequency of the plurality of types of monitored data stored in the temporary memory unit during the one period; (d) writing the plurality of types of monitored data outputted from the substrate processing apparatus to the temporary memory unit during the second time period based on the storing frequency allocated in the step (c); and (e) reading the plurality of types of monitored data from the temporary memory unit for every third time period and writing the plurality of types of monitored data to the accumulative memory unit.
 8. The substrate processing apparatus of claim 2, further comprising: a priority memory unit configured to store a priority of each type of monitored data for writing the plurality of types of monitored data to the temporary memory unit, wherein the monitored data writing allocation unit allocates a higher storing frequency to a type of monitored data with high priority higher for writing the plurality of types of monitored data to the temporary memory unit during the second time period and a lower storing frequency to a type of monitored data with low priority for writing the plurality of types of monitored data to the temporary memory unit during the second time period, based on the priority stored in the priority memory unit.
 9. The substrate processing apparatus of claim 2, further comprising: a priority memory unit configured to store a priority of each type of monitored data for writing the plurality of types of monitored data to the temporary memory unit, wherein the monitored data writing allocation unit allocates the storing frequency for writing the plurality of types of monitored data to the temporary memory unit during the second time period, based on the upper limit of the storing frequency, the monitored data rate and the priority stored in the priority memory unit.
 10. The substrate processing system of claim 9, wherein the priority of each type of monitored data is one of a first priority, a second priority and a third priority, and the monitored data writing allocation unit allocates a first storing frequency to a type of monitored data with the first priority, a second storing frequency to a type of monitored data with the second priority and a type of monitored data with the third priority wherein the second storing frequency is equal to or less than a difference between the first storing frequency and the upper limit of the storing frequency, and a third storing frequency to the type of monitored data with the second priority wherein the third storing frequency is equal to a difference between the upper limit of the storing frequency and a sum of the first storing frequency and the second storing frequency.
 11. The substrate processing apparatus of claim 2, further comprising: a monitoring unit configured to monitor an amount of accumulated data transmitted from the temporary memory unit to the accumulative memory unit, wherein the accumulative data writing unit is configured to extend a period of storing the plurality of types of monitored data in the temporary memory unit to the accumulative memory unit when the monitoring unit determines the amount of accumulated data is greater than a predetermined amount. 